912289-98-6

Basic information

• Product Name: difluorosulfoacetic acid sodium salt
• Synonyms: difluorosulfoacetic acid sodium salt
• CAS NO: 912289-98-6
• Molecular Weight: 198.08
• Mol File: 912289-98-6.mol
• Article Data: 27

Chemical Properties

• CAS DataBase Reference: difluorosulfoacetic acid sodium salt(CAS DataBase Reference)
• NIST Chemistry Reference: difluorosulfoacetic acid sodium salt(912289-98-6)
• EPA Substance Registry System: difluorosulfoacetic acid sodium salt(912289-98-6)

Safety Data

• Hazardous Substances Data: 912289-98-6(Hazardous Substances Data)

Upstream product

• 680-15-9 2,2-difluoro-2-(fluorosulfonyl)acetate 
• 108-90-7 chlorobenzene 

Downstream Products

• 1402933-02-1 C₂HF₂O₅S^(1-)*C₂₀H₂₆I⁽¹⁺⁾ 
• 1264173-46-7 C₂HF₂O₅S^(1-)*C₂₁H₂₁S⁽¹⁺⁾ 
• 1165795-39-0 C₁₀H₄F₇O₆S^(1-)*Na⁽¹⁺⁾ 
• 1264173-48-9 C₂HF₂O₅S^(1-)*C₁₂H₁₅OS⁽¹⁺⁾ 
• 1264173-47-8 C₂HF₂O₅S^(1-)*C₁₂H₁₀I⁽¹⁺⁾ 
• 944480-02-8 triphenylsulfonium (2-(naphthalen-1-yl)ethoxycarbonyl)difluoromethanesulfonate 
• 935276-88-3 1-cyclohexylmethyl difluorosulfoacetate sodium salt 
• 1013326-92-5 C₂₁H₂₉F₂O₇S^(1-)*Na⁽¹⁺⁾ 
• 1013326-86-7 C₂₀H₂₃F₂O₅S^(1-)*Na⁽¹⁺⁾ 
• 942619-42-3 C₂HF₂O₅S^(1-)*C₁₈H₁₅S⁽¹⁺⁾ 

Relevant articles and documents

Sulfonium sulfonate salt photoacid generator synthesized from guaiacol and synthesis method for sulfonium sulfonate salt photoacid generator

The invention discloses a sulfonium sulfonate salt photoacid generator synthesized from guaiacol and a synthesis method for the sulfonium sulfonate salt photoacid generator, belonging to the fields ofchemical synthesis and photoetching materials. The photoacid generator has a structural general formula which is described in the specification. In the structural general formula, R1 is one selectedfrom the group consisting of groups which are described in the specification; and R2 is one selected from the group consisting of a covalent bond, an alkyl group, a cycloalkyl group, an ester group containing alkyl group and a fluorine-containing alkyl group. The synthesis method for the photoacid generator comprises the following steps: allowing the guaiacol to react with a sulfonate compound soas to obtain an intermediate; and allowing the intermediate to react with (cyclohexyl-1,5-dienyloxy)-trimethyl-silane, tetramethylene sulfoxide and trifluoroacetic anhydride so as to obtain the sulfonium sulfonate salt photoacid generator is obtained. According to the invention, a raw material, namely the guaiacol adopted in the method provided by the invention has large molecular weight, so the photoacid generator formed by the guaiacol also has large molecular weight; diffusion of the photoacid generator can be reduced; and improvement of the edge roughness, reduction of the line width roughness and improvement of the resolution ratio are facilitated.

Salt

PROBLEM TO BE SOLVED: To provide a method for producing a sulfonium salt useful as an acid generator in good yield.SOLUTION: This production method of the sulfonium salt expressed by formula (I) comprises reacting a sulfonium salt expressed by formula (II) with a compound expressed by formula: HO-X-W in the presence of titanium (IV) alkoxide. In formulae, Qand Qeach represents F or the like; Rrepresents 1-4C alkyl; Zrepresents an organic cation; W represents 3-36C alicyclic hydrocarbon; and Xrepresents a single bond or 1-6C alkanediyl.

Acid generator for a resist composition of the salt

PROBLEM TO BE SOLVED: To provide a salt for an acid generator affording a resist composition showing high resolution. SOLUTION: The salt is represented by formula (I). In formula (I), Q1and Q2are each F or a perfluoroalkyl group; X1is a bivalent saturated hydrocarbon group, provided that -CH2- in the group is optionally substituted with -O- or -CO-; Y1is an aliphatic hydrocarbon group, alicyclic hydrocarbon group or aromatic hydrocarbon group, provided that -CH2- in the aliphatic hydrocarbon group or the alicyclic hydrocarbon group is optionally substituted with -O- or -CO-; Rp1and Rp2are each an alkyl group; Rp3and Rp4are each H or an alkyl group; Xp1is -[CH2]p1-, provided that -CH2- in the group is optionally substituted with -O-, -CO-, bivalent alicyclic hydrocarbon group or bivalent aromatic hydrocarbon group, and that H in the group is optionally substituted with a hydroxy group or aliphatic hydrocarbon group; and p1is an integer of 1-8; and A is a polymerizable group. COPYRIGHT: (C)2011,JPOandINPIT