Technology Process of Hafnium silicide
There total 2 articles about Hafnium silicide which
guide to synthetic route it.
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synthetic route:
- Guidance literature:
-
In
solid;
Hf film deposited on Si(001) at room temp. in vac., annealed at 1000 °C for thick films and at 750 °C for thin;
DOI:10.1103/PhysRevB.69.235322
- Guidance literature:
-
In
neat (no solvent);
byproducts: MgCl2; vac. or N2 filled glove box; mixt. grinding, heating in evac. sealed quartz ampoule at 850°C for 10 h, cooling to room temp., grinding; powder trituration with MeOH or H2O;